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154 pages • missing pub info (editions)
ISBN/UID: 9783642317750
Format: Hardcover
Language: English
Publisher: Springer
Publication date: 28 August 2012
Description
Mulilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano ...
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154 pages • missing pub info (editions)
ISBN/UID: 9783642317750
Format: Hardcover
Language: English
Publisher: Springer
Publication date: 28 August 2012
Description
Mulilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano ...