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316 pages • missing pub info (editions)
ISBN/UID: 9783658192372
Format: Paperback
Language: English
Publisher: Springer Vieweg
Publication date: 22 September 2017
Description
Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The...
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316 pages • missing pub info (editions)
ISBN/UID: 9783658192372
Format: Paperback
Language: English
Publisher: Springer Vieweg
Publication date: 22 September 2017
Description
Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The...
Community Reviews
Content Warnings